柔性铰链相关外文翻译Word文档下载推荐.docx
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柔性铰链相关外文翻译Word文档下载推荐.docx
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APrecisionCapacitanceCellforMeasurementofThinFilmOut-of-PlaneExpansion–PartIII:
ConductingandSemiconductingMaterials
译文1:
一种精密电容测量薄膜平面扩张的第三部分:
导体和半导体材料
原文2:
Circularareflexiblehingestiffnesscharacteranalysis
译文2:
圆弧型柔性铰链刚度特性分析
Abstract—Thispaperdescribestheconstruction,calibration,anduseofaprecisioncapacitance-basedmetrologyforthemeasurementofthethermalandhygrothermal(swelling)expansionofthinfilms.Itisdemonstratedthatwiththisversionofourcapacitancecell,materialsranginginelectricalpropertiesfrominsulatorstoconductorscanbemeasured.Theresultsofourmeasurementsonp-type<
100>
-orientedsinglecrystalsiliconarecomparedtotherecommendedstandardreferencevaluesfromtheliteratureandareshowntobeinexcellentagreement.
IndexTerms—Capacitancecell,coefficientofthermalexpansion(CTE),guardedelectrode,highsensitivitydisplacement,innerlayerdielectrics,polymers,thinfilms.
I.INTRODUCTION
THEcoefficientofthermalexpansion(CTE)isakeydesignparameterinmanyapplications.Itisusedforestimatingdimensionaltolerancesandthermalstressmismatches.Thelatterisofgreatimportancetotheelectronicsindustry,wherethermalstressescanleadtodevicefailure.Foraccuratemodelingofthesesystems,reliablevaluesareneededfortheCTE.
Traditionally,displacementgaugetechniquessuchasthermomechanicalanalysis(TMA)havebeenutilizedfordeterminingtheCTE.However,standardtestmethodsbasedonthesetechniquesarelimitedtodimensionsgreaterthan100
m[1-2].Thisisproblematicformaterialswhichcanbeformedonlyasthinlayers(suchascoatingsandcertaininnerlayerdielectrics).Additionally,thereissomequestionastowhethervaluesobtainedonlargersamples(bulkmaterial)arethesameasthoseobtainedforthinfilms,evenwhentheeffectsoflateralconstraintsareincludedinthecalculations.
Ithaslongbeenrecognizedthatcapacitance-basedmeasurements,inprinciple,canofferthenecessaryresolutionforthesefilms.Forapairofplane-parallelplatecapacitors,ifthesampleisusedtosetthespacingoftheplates
whilebeingoutsideofthemeasurementpath,thenforaconstanteffectiveareaoftheplates
thecapacitanceinavacuum
isgivenbythewell-knownequation
(1)
where
isthepermittivityoffreespace(
).Withthesampleoutsideofthemeasurementpathandonlyairetweentheelectrodes,thevacuumcapacitanceisobtainedromthemeasuredcapacitance
by
(2)
where
isthedielectricconstantofair.
Inthreepreviouspapers,thedesignanddatareductiontechniqueswerepresentedforourthree-terminalcapacitance-basedmetrologyforthinpolymerfilmmeasurements.Thefirstpaper(I)describedtheinitialdesignbasedongold-coatedZerodur.However,severalproblemswereencountered.ItwasdiscoveredthatZerodurdisplaysferroelectricbehavior,withanapparentCurietemperatureof206℃asdeterminedbyfittingwithaCurie–Weisslaw.TherapidchangeinthedielectricconstantoftheZeroduralongwithacouplingfromthecentralcontactthroughtheguardgaptothehighelectrodecreatedanapparentnegativethermalexpansion.Thesecondproblemwiththeinitialdesignwaswiththegoldcoating.Thiscoatinghadthetendencyto“snowplow”whenscratchesformedinthesurfacecreatingraisedareaswhichwouldresultinshortswhenmeasurementswereperformedonthinsamples.Thesecondproblemwiththegoldwasthatitunderwentmechanicalcreepunderloading.
Toresolvetheseproblems,anewelectrodewasdesignedfromfusedquartzcoatedwithnichrome.Agroovefilledwithconductivesilverpaintwasaddedtothebacksideofthebottomelectrodearoundthecentralcontacttointerceptanyfieldlinesbetweenthecentralwirecontactthroughtheguardgaptothehighelectrode.Thenewdesignwasdescribedinthesecondpaper(II)alongwiththermalexpansionmeasurementson<
0001>
-orientedsinglecrystalsapphire(
)anda14-
thickinnerlayerdielectricmaterial[10].ItwasrecognizedinIIthatthedatareductionwassimpleaslongastheairfillingthegapbetweenthecapacitorplateswasdry.However,toexpandtheutilityofthecapacitancecelltohygrothermalexpansion(i.e.,swellinginahumidenvironment),thethirdpaper(III)describedthedatareductiontechniquesnecessaryforuseofthecapacitancecellunderhumidconditions.
Fig.1.Schematicoftheelectrodes.Notethattheshadedareascorrespondtothenichromecoating.
TheresolutionoftheinstrumentwasdeterminedinIIandIII.Fordry,isothermalconditions,thecapacitancecellcanmeasurerelativechangesinthicknessontheorderof
fora0.5-mmthicksample;
thiscorrespondstoaresolutionontheorderof
.Underdryconditionsinwhichthetemperatureischanged,thereproducibilityofarelativethicknesschange(e.g.,forCTEmeasurement)isontheorderof
.Finally,underhumidconditions,theultimateresolutionisprimarilyafunctionoftemperature—theactualvaluesofwhicharegiveninIII.
InII,adeficiencywasrecognizedinthedesign.Neithersemiconductingorconductingmaterialscouldbeusedasthematerialfortesting.Thiswasespeciallythecaseforsilicon,whichformsaSchottkybarrierwithnichromeandactsasavoltagerectifier.Additionally,becauseofthenatureoftheinterface,the1kHzmeasurementfrequencygeneratesultrasoundwhichresultsintheepoxycontactsbeingshakenloose.WementionedbrieflyinIIthatifthetopelectrodehadaguardringadded,thesamplecouldbeheldatzeropotentialandthiswouldnolongerbeaproblem.Todemonstratethis,weconstructedsuchacapacitancecell—thedesignandtestingofwhicharedescribedinthispaper.
II.CAPACITANCECELLDESIGN
A.ElectrodeDesign
BecausetheconstructionoftheelectrodeswasthoroughlydescribedinII,alessdetaileddescriptionwillbegivenwithemphasisonthechangesinthedesign.Theelectrodeswereconstructed,asbefore,inthefollowingmanner(seeFig.1).
cylindricalblanksoffusedquartzweregroundandpolishedtoopticalflatness.Smallholesweredrilledthroughthecenterofeachblanksothat16gaugewirecouldbeinsertedintothem.Thewireswerethencementedwithaconductingepoxy(resistivityof
at25℃).Asecondholeandwirewerethenaddedtoeachblankapproximately0.75cmfromtheedgeoftheblanks.Acoatingofnichromewasthenaddedsuchthatitcoveredallsurfacesexceptforasmallareaaroundthebackoftheblanks.Aguardgapwasscribedonboththetopandbottomelectrodessuchthatnomaterialwasraisedwhichcouldcauseashort.Onthebottomelectrode,theguardgapwasscribedona3cmdiameter,andonthetopelectrodeitwasscribedona6cmdiameter.Inthebottomelectrode,a1cmdiameterwellwascutintothebackoftheblankwhichextendedtowithin5mmofthefrontsurface.Thiswellwasthenfilledwithathinconductivesilverpaint.Thepaintconnectedtheouterguardring’smetallizationtotheedgeofthewell.
Fig.2.Schematicoftheassembledcapacitancecell.
B.CellAssemblyandCapacitanceMeasurements
TheholderdescribedinIIwasemployedforthemodifiedcell.Inthisversionofthecapacitancecell,bothconductorsofthesemirigidcoaxiallinewereconnectedtothetopelectrode.Thecenterconnectorandbraidwereconnectedtothecenterareaandouterguardring,respectively,byfine30gaugewirecoils.Thecoilswereterminatedwithcenterfemalecontactsfrom50
BNCconnectors,whichcouldbeeasilyconnected/disconnectedtothe16gaugetinnedcopperwirethatwasepoxiedintotheelectrodes.AschematicoftheassembledcellisshowninFig.2.ThefemaleBNCconnectoronthebrassholder(bottomelectrode)wasconnectedtothelowterminal,andthefemaleBNCconnectoronthesemirigidcoaxiallinewasconnectedtothehighterminal.AllconnectionsfromthecapacitancecelltothebridgewereperformedusingTefloninsulatedlownoisecables.
Thecapacitancemeasurementswereobtainedusingacommercialautomatedthree-terminalcapacitancebridgewhichusesanoven-stabilizedquartzcapacitorandhasacitedguaranteedrelativeresolutionofbetterthan
pF/pFfortherangeofcapacitancesusedwiththiscell(Andeen–Hagerling2500A1kHzUltra-PrecisionCapacitanceBridgewithOptionE).(Notethatthe“useful”relativeresolutionissuggestedbythemanufacturertobetypicallyafactorof10ormorebetterthatthecitedrelativeresolution.)Thecapacitancebridge’scalibrationwasverifiedagainstaNationalInstituteofStandardsandTechnology(NIST)calibratedstandardreferencecapacitor—thedifferencebetweenthetwowaswithinthecapacitor’suncertainty.
Allmeasurementswereperformedinatemperature/humiditychamberequippedwitha90℃dewpointairpurge.Thecellwasequilibratedateachtemperatureuntiltherelativefluctuationsinthevacuumcorrectedcapacitancewerenomorethan
10pF/pF.Barometricpressurewasmonitoredusingadigitalpressuresensorwithamanufacturer’sstateduncertaintyof0.1mmHg(13Pa).AsstatedpreviouslyinII,thetemperatureofthecellwascalibratedintermsofthechambertemperaturewitharesistancetemperaturedevice(RTD)mountedtothecellwiththermallyconductingpaste.TheRTDwascalibratedagainstaNISTcertifiedITS-90standardreferencethermometer.AsinII,becauseweareusingadryairpurge,wecanusetheidealgaslawcorrectiontodeterminethemolarvolumeoftheair
tocalculate
(3)
Where
T---absolutetemperature;
P---pessure;
R---gasconstan
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